Inventor
GEHMLICH MICHAEL
DE5 patents
Patents
5 patentsUS10961640B2Mar 30, 2021
Semiconductor wafer composed of single-crystal silicon with high gate oxide breakdown, and a process for the manufacture thereof
SILTRONIC AG1 citations59
US10483128B2Nov 19, 2019
Epitaxially coated semiconductor wafer, and method for producing an epitaxially coated semiconductor wafer
SILTRONIC AG1 citations57
US11639558B2May 2, 2023
Method for producing a semiconductor wafer composed of monocrystalline silicon
SILTRONIC AG0 citations48
US12497710B2Dec 16, 2025
Method for producing semiconductor wafers
SILTRONIC AG0 citations47
US9230798B2Jan 5, 2016
Semiconductor wafer composed of silicon and method for producing same
SILTRONIC AG1 citations44