Inventor
SUMITANI AKIRA
JP27 patents
⚠️ This page may combine multiple inventors who share the name “SUMITANI AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOMATSU MFG CO LTD
7 patentsUS7915600B2Mar 29, 2011
Extreme ultra violet light source apparatus
KOMATSU MFG CO LTD22 citations92
US6810061B2Oct 26, 2004
Discharge electrode and discharge electrode manufacturing method
KOMATSU MFG CO LTD32 citations92
US6496527B1Dec 17, 2002
Ultraviolet laser apparatus and gas for ultraviolet laser
KOMATSU MFG CO LTD24 citations90
US5811051ASep 22, 1998
Method and apparatus for continuously draw-molding fiber reinforced plastic rod formed with spiral groove
KOMATSU MFG CO LTD36 citations86
US7880153B2Feb 1, 2011
Extreme ultra violet light source apparatus
KOMATSU MFG CO LTD14 citations84
US7683355B2Mar 23, 2010
Extreme ultra violet light source apparatus
KOMATSU MFG CO LTD4 citations63
US7006548B1Feb 28, 2006
Excimer laser device and gas for excimer laser
KOMATSU MFG CO LTD3 citations54
GIGAPHOTON INC
5 patentsUS7923705B2Apr 12, 2011
Extreme ultra violet light source apparatus
GIGAPHOTON INC25 citations92
US8710475B2Apr 29, 2014
Extreme ultraviolet light source device and method for generating extreme ultraviolet light
GIGAPHOTON INC7 citations84
US8804902B2Aug 12, 2014
Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatus
GIGAPHOTON INC0 citations52
US8698116B2Apr 15, 2014
Extreme ultra violet light source apparatus
GIGAPHOTON INC1 citations52
US8354657B2Jan 15, 2013
Extreme ultra violet light source apparatus
GIGAPHOTON INC0 citations48
MORIYA MASATO
4 patentsUS8536551B2Sep 17, 2013
Extreme ultra violet light source apparatus
MORIYA MASATO10 citations84
US8256441B2Sep 4, 2012
Method for cleaning optical element of EUV light source device and optical element cleaning device
MORIYA MASATO15 citations84
US8173984B2May 8, 2012
Extreme ultraviolet light source apparatus
MORIYA MASATO8 citations84
US8294129B2Oct 23, 2012
Extreme ultraviolet light source apparatus
MORIYA MASATO3 citations62
MAZDA MOTOR
3 patentsUS9926998B2Mar 27, 2018
Piston structure for engine
MAZDA MOTOR2 citations68
US10760636B2Sep 1, 2020
Engine reciprocative rotating mechanism and method for manufacturing the same
MAZDA MOTOR0 citations33
US10612615B2Apr 7, 2020
Engine reciprocative rotating mechanism and method for manufacturing the same
MAZDA MOTOR0 citations33