Inventor
VAN INGEN SCHENAU KOENRAAD
NL7 patents
Patents
7 patentsUS11079687B2Aug 3, 2021
Process window based on defect probability
ASML NETHERLANDS BV11 citations83
US11768442B2Sep 26, 2023
Method of determining control parameters of a device manufacturing process
ASML NETHERLANDS BV1 citations71
US11513442B2Nov 29, 2022
Method of determining control parameters of a device manufacturing process
ASML NETHERLANDS BV2 citations71
US12197136B2Jan 14, 2025
Method of determining control parameters of a device manufacturing process
ASML NETHERLANDS BV0 citations61
US11822255B2Nov 21, 2023
Process window based on defect probability
ASML NETHERLANDS BV0 citations60
US12386268B2Aug 12, 2025
Method for calibrating simulation process based on defect-based process window
ASML NETHERLANDS BV0 citations57
US11733606B2Aug 22, 2023
Method for performing a manufacturing process and associated apparatuses
ASML NETHERLANDS BV1 citations56