Inventor
TAI CHIU-YING
US7 patents
⚠️ This page may combine multiple inventors who share the name “TAI CHIU-YING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MKS INSTR INC
3 patentsUS11114287B2Sep 7, 2021
Radical output monitor for a remote plasma source and method of use
MKS INSTR INC7 citations83
US11733224B2Aug 22, 2023
Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use
MKS INSTR INC0 citations57
US12207385B2Jan 21, 2025
Method and apparatus for plasma ignition in toroidal plasma sources
MKS INSTR INC0 citations49