Inventor
ERICKSON BLAKE W
US5 patents
Patents
5 patentsUS12442765B2Oct 14, 2025
Transmission corrected plasma emission using in-situ optical reflectometry
APPLIED MATERIALS INC0 citations59
US12031910B2Jul 9, 2024
Transmission corrected plasma emission using in-situ optical reflectometry
APPLIED MATERIALS INC0 citations59
US12469686B2Nov 11, 2025
Process characterization and correction using optical wall process sensor (OWPS)
APPLIED MATERIALS INC0 citations46
US12080574B2Sep 3, 2024
Low open area and coupon endpoint detection
APPLIED MATERIALS INC0 citations46
US12009191B2Jun 11, 2024
Thin film, in-situ measurement through transparent crystal and transparent substrate within processing chamber wall
APPLIED MATERIALS INC0 citations41