Inventor

KUBOTA SHIGEKI

JP2 patents

Patents

2 patents

US12565599B2Mar 3, 2026

Slurry, polishing method, and method for manufacturing semiconductor component

RESONAC CORP0 citations54

US12522748B2Jan 13, 2026

Slurry, polishing method, and method for producing semiconductor component

RESONAC CORP0 citations54