Inventor · disambiguated record
Mitsunari Satake
Also filed as: SATAKE MITSUNARI
4 granted patents·3 pending applications·146 citations·filing 1997–2007
78Inventor score
Files withMATSUSHITA ELECTRIC INDUSTRIAL CO LTD7
Top patents by PatentIndex Score
7 records- 0189US6012967APolishing method and polishing apparatusMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1997·Granted Jan 11, 2000·114 cites·32 claims
- 0265US6737348B2Method for forming buried interconnectMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2002·Granted May 18, 2004·11 cites·3 claims
- 0353US2007161342A1Polishing pad, polishing apparatus and method for polishing waferMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2007·Application pending·0 cites
- 0451US6074289AApparatus for holding substrate to be polishedMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1997·Granted Jun 13, 2000·18 cites·11 claims
- 0543US6746962B2Method for fabricating a semi-conductor device having a tungsten film-filled via holeMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2001·Granted Jun 8, 2004·3 cites·10 claims
- 0637US2004248401A1Method for forming buried wiring and semiconductor deviceMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2004·Application pending·0 cites
- 0737US2004266322A1Polishing pad, polishing apparatus and method for polishing waferMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2004·Application pending·0 cites
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