Inventor

PAN CHENYU

US3 patents

⚠️ This page may combine multiple inventors who share the name “PAN CHENYU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASM INC

2 patents

US6410888B2Jun 25, 2002

Process chamber cooling

ASM INC18 citations88

US6259062B1Jul 10, 2001

Process chamber cooling

ASM INC18 citations88

RICE UNIVERSITY

1 patent

US5589231ADec 31, 1996

Halogen-activated chemical vapor deposition of diamond

RICE UNIVERSITY25 citations90