Inventor
TOSHIMA MASATO M
US13 patents
⚠️ This page may combine multiple inventors who share the name “TOSHIMA MASATO M”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
12 patentsUS6518195B1Feb 11, 2003
Plasma reactor using inductive RF coupling, and processes
APPLIED MATERIALS INC162 citations98
US6068784AMay 30, 2000
Process used in an RF coupled plasma reactor
APPLIED MATERIALS INC173 citations98
US5556501ASep 17, 1996
Silicon scavenger in an inductively coupled RF plasma reactor
APPLIED MATERIALS INC396 citations98
US5186594AFeb 16, 1993
Dual cassette load lock
APPLIED MATERIALS INC199 citations98
US6545420B1Apr 8, 2003
Plasma reactor using inductive RF coupling, and processes
APPLIED MATERIALS INC135 citations97
US6488807B1Dec 3, 2002
Magnetic confinement in a plasma reactor having an RF bias electrode
APPLIED MATERIALS INC145 citations97
US6251792B1Jun 26, 2001
Plasma etch processes
APPLIED MATERIALS INC122 citations97
US6454519B1Sep 24, 2002
Dual cassette load lock
APPLIED MATERIALS INC42 citations95
US5769588AJun 23, 1998
Dual cassette load lock
APPLIED MATERIALS INC47 citations95
US5308417AMay 3, 1994
Uniformity for magnetically enhanced plasma chambers
APPLIED MATERIALS INC63 citations93
US6454508B2Sep 24, 2002
Dual cassette load lock
APPLIED MATERIALS INC20 citations91
US6599076B2Jul 29, 2003
Dual cassette load lock
APPLIED MATERIALS INC12 citations81