Inventor
STENHOLM MARK A
US5 patents
Patents
5 patentsUS5186594AFeb 16, 1993
Dual cassette load lock
APPLIED MATERIALS INC199 citations98
US6454519B1Sep 24, 2002
Dual cassette load lock
APPLIED MATERIALS INC42 citations95
US5769588AJun 23, 1998
Dual cassette load lock
APPLIED MATERIALS INC47 citations95
US6454508B2Sep 24, 2002
Dual cassette load lock
APPLIED MATERIALS INC20 citations91
US6599076B2Jul 29, 2003
Dual cassette load lock
APPLIED MATERIALS INC12 citations81