Inventor
SHAKED AMIT
IL9 patents
⚠️ This page may combine multiple inventors who share the name “SHAKED AMIT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
5 patentsUS10551749B2Feb 4, 2020
Metrology targets with supplementary structures in an intermediate layer
KLA TENCOR CORP3 citations72
US10415963B2Sep 17, 2019
Estimating and eliminating inter-cell process variation inaccuracy
KLA TENCOR CORP2 citations72
US10571811B2Feb 25, 2020
Device metrology targets and methods
KLA TENCOR CORP5 citations71
US11709433B2Jul 25, 2023
Device-like metrology targets
KLA TENCOR CORP0 citations62
US11054752B2Jul 6, 2021
Device metrology targets and methods
KLA TENCOR CORP0 citations61