Inventor

TSENG LEE-CHUAN

TW57 patents

⚠️ This page may combine multiple inventors who share the name “TSENG LEE-CHUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TSENG LEE-CHUAN

TAIWAN SEMICONDUCTOR MFG CO LTD

Semiconductor device and method for fabricating the same

Recess with tapered sidewalls for hermetic seal in MEMS devices

Noble gas bombardment to reduce scallops in bosch etching

High efficiency getter design in vacuum MEMS device

Self-aligned double patterning (SADP) method

Method for mapping wafers in a wafer carrier

Fence structure to prevent stiction in a MEMS motion sensor

Dielectric sidewall structure for quality improvement in Ge and SiGe devices

Biosensor field effect transistor having specific well structure and method of forming the same

Formation method of MEMS device structure with cavities

High aspect ratio etch without upper widening

Process and related device for removing by-product on semiconductor processing chamber sidewalls

Dielectric sidewall structure for quality improvement in Ge and SiGe devices

Dielectric sidewall structure for quality improvement in Ge and SiGe devices

Segmented pedestal for mounting device on chip

Low contamination chamber for surface activation

Fence structure to prevent stiction in a MEMS motion sensor

Semiconductor arrangement and formation thereof

Segmented pedestal for mounting device on chip

Dielectric sidewall structure for quality improvement in GE and SIGE devices

Mechanism for MEMS bump side wall angle improvement

Ion beam etching chamber with etching by-product redistributor

Semiconductor device and method for fabricating the same

Ion beam etching chamber with etching by-product redistributor

Comb electrode release process for MEMS structure

Semiconductor device and method of making

Sonar sensor in processing chamber

Semiconductor device and method of making

Semiconductor device and method of making

Comb electrode release process for MEMS structure

Semiconductor structure and method for fabricating the same

Ion beam etching chamber with etching by-product redistributor

Method for real time monitoring semiconductor fabrication process

Robot blade design

Self-aligned double patterning (SADP) method

Process and related device for removing by-product on semiconductor processing chamber sidewalls

Process and related device for removing by-product on semiconductor processing chamber sidewalls

Wafer chuck structure with holes in upper surface to improve temperature uniformity

Method and apparatus for reducing in-process and in-use stiction for MEMS devices

Semiconductor arrangement and formation thereof

Semiconductor arrangement and formation thereof

Method and apparatus for reducing in-process and in-use stiction for MEMS devices

Structure and formation method of interconnection structure of semiconductor device structure

Method and apparatus for etching wafer with etching gas

Wafer Level Hermetic Seal Process for microelectromechanical systems (MEMS) devices

Method and apparatus for reducing in-process and in-use stiction for MEMS devices

Micro electro mechanical system (MEMS) device having via extending through plug

CMOS compatible biofet

High efficiency getter design in vacuum MEMS device

TAIWAN SEMICONDUCTOR MFG

Low contamination chamber for surface activation