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Inventor
AMATO LUIGI G
US
2 patents
⚠️ This page may combine multiple inventors who share the name “AMATO LUIGI G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
1 patent
US9490153B2
Nov 8, 2016
Mechanical alignment of substrates to a mask
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
6 citations
67
APPLIED MATERIALS INC
1 patent
US12046443B2
Jul 23, 2024
Shield for filament in an ion source
APPLIED MATERIALS INC
0 citations
40