Inventor
PERETS YUVAL
IL5 patents
⚠️ This page may combine multiple inventors who share the name “PERETS YUVAL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
3 patentsUS10670955B2Jun 2, 2020
Critical dimension variation correction in extreme ultraviolet lithography
ZEISS CARL SMT GMBH3 citations67
US10095101B2Oct 9, 2018
Critical dimension variation correction in extreme ultraviolet lithography
ZEISS CARL SMT GMBH2 citations67
US10578975B2Mar 3, 2020
Method for correcting the critical dimension uniformity of a photomask for semiconductor lithography
ZEISS CARL SMT GMBH0 citations37