Inventor
POLLARD CHAD
US8 patents
Patents
8 patentsUS12472604B2Nov 18, 2025
Grounding techniques for ESD polymeric fluid lines
APPLIED MATERIALS INC0 citations61
US12459078B2Nov 4, 2025
In-situ conditioner disk cleaning during CMP
APPLIED MATERIALS INC0 citations61
US12290897B2May 6, 2025
Fluid-tight electrical connection techniques for semiconductor processing
APPLIED MATERIALS INC0 citations61
US12106976B2Oct 1, 2024
Steam-assisted single substrate cleaning process and apparatus
APPLIED MATERIALS INC0 citations59
US11728185B2Aug 15, 2023
Steam-assisted single substrate cleaning process and apparatus
APPLIED MATERIALS INC1 citations59
US12392427B2Aug 19, 2025
Insulated fluid lines in chemical mechanical polishing
APPLIED MATERIALS INC0 citations50
US11251047B2Feb 15, 2022
Clog detection in a multi-port fluid delivery system
APPLIED MATERIALS INC0 citations50
US11833637B2Dec 5, 2023
Control of steam generation for chemical mechanical polishing
APPLIED MATERIALS INC0 citations48