Inventor

LANE LARRY R

US2 patents

⚠️ This page may combine multiple inventors who share the name “LANE LARRY R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN ASSOCIATES

1 patent

US4796562AJan 10, 1989

Rapid thermal cvd apparatus

VARIAN ASSOCIATES101 citations91

NOVELLUS SYSTEMS INC

1 patent

US6607982B1Aug 19, 2003

High magnesium content copper magnesium alloys as diffusion barriers

NOVELLUS SYSTEMS INC51 citations90