Inventor
SLATER SYDNEY GEORGE
US5 patents
Patents
5 patentsUS6783916B2Aug 31, 2004
Hydroxy-amino thermally cured undercoat of 193 nm lithography
ARCH SPEC CHEM INC14 citations91
US6492092B1Dec 10, 2002
Hydroxy-epoxide thermally cured undercoat for 193 NM lithography
ARCH SPEC CHEM INC20 citations91
US6323287B1Nov 27, 2001
Hydroxy-amino thermally cured undercoat for 193 NM lithography
ARCH SPEC CHEM INC33 citations91
US6054248AApr 25, 2000
Hydroxy-diisocyanate thermally cured undercoat for 193 nm lithography
ARCH SPEC CHEM INC21 citations91
US7217497B2May 15, 2007
Hydroxy-amino thermally cured undercoat for 193 nm lithography
ARCH SPEC CHEM INC0 citations50