Inventor
STEINHAEUSLER THOMAS
US6 patents
⚠️ This page may combine multiple inventors who share the name “STEINHAEUSLER THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ARCH SPEC CHEM INC
5 patentsUS6146793ANov 14, 2000
Radiation sensitive terpolymer, photoresist compositions thereof and 193 nm bilayer systems
ARCH SPEC CHEM INC30 citations92
US6783916B2Aug 31, 2004
Hydroxy-amino thermally cured undercoat of 193 nm lithography
ARCH SPEC CHEM INC14 citations91
US6492092B1Dec 10, 2002
Hydroxy-epoxide thermally cured undercoat for 193 NM lithography
ARCH SPEC CHEM INC20 citations91
US6054248AApr 25, 2000
Hydroxy-diisocyanate thermally cured undercoat for 193 nm lithography
ARCH SPEC CHEM INC21 citations91
US7217497B2May 15, 2007
Hydroxy-amino thermally cured undercoat for 193 nm lithography
ARCH SPEC CHEM INC0 citations50