Inventor
BIAFORE JOHN JOSEPH
US8 patents
Patents
8 patentsUS6783916B2Aug 31, 2004
Hydroxy-amino thermally cured undercoat of 193 nm lithography
ARCH SPEC CHEM INC14 citations91
US6492092B1Dec 10, 2002
Hydroxy-epoxide thermally cured undercoat for 193 NM lithography
ARCH SPEC CHEM INC20 citations91
US6323287B1Nov 27, 2001
Hydroxy-amino thermally cured undercoat for 193 NM lithography
ARCH SPEC CHEM INC33 citations91
US6165682ADec 26, 2000
Radiation sensitive copolymers, photoresist compositions thereof and deep UV bilayer systems thereof
ARCH SPEC CHEM INC54 citations91
US6054248AApr 25, 2000
Hydroxy-diisocyanate thermally cured undercoat for 193 nm lithography
ARCH SPEC CHEM INC21 citations91
US6610808B2Aug 26, 2003
Thermally cured underlayer for lithographic application
ARCH SPEC CHEM INC28 citations90
US6924339B2Aug 2, 2005
Thermally cured underlayer for lithographic application
ARCH SPEC CHEM INC12 citations82
US7217497B2May 15, 2007
Hydroxy-amino thermally cured undercoat for 193 nm lithography
ARCH SPEC CHEM INC0 citations50