Inventor
TOKAI NOBUO
JP3 patents
Patents
3 patentsUS6884464B2Apr 26, 2005
Methods for forming silicon comprising films using hexachlorodisilane in a single-wafer deposion chamber
APPLIED MATERIALS INC21 citations89
US7393417B1Jul 1, 2008
Semiconductor-manufacturing apparatus
APPLIED MATERIALS INC30 citations88
US6566199B2May 20, 2003
Method and system for forming film, semiconductor device and fabrication method thereof
APPLIED MATERIALS INC11 citations72