Inventor

ESTES SCOTT ALAN

US4 patents

⚠️ This page may combine multiple inventors who share the name “ESTES SCOTT ALAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

3 patents

US6812193B2Nov 2, 2004

Slurry for mechanical polishing (CMP) of metals and use thereof

IBM53 citations90

US7888142B2Feb 15, 2011

Copper contamination detection method and system for monitoring copper contamination

IBM1 citations45

US7957917B2Jun 7, 2011

Copper contamination detection method and system for monitoring copper contamination

IBM0 citations35

BURNHAM JAY SANFORD

1 patent

US8236580B2Aug 7, 2012

Copper contamination detection method and system for monitoring copper contamination

BURNHAM JAY SANFORD0 citations39