Inventor

VANOPPEN PETER CLEMENT PAUL

BE7 patents

⚠️ This page may combine multiple inventors who share the name “VANOPPEN PETER CLEMENT PAUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

3 patents

US9158194B2Oct 13, 2015

Metrology method and apparatus, and device manufacturing method

ASML NETHERLANDS BV9 citations83

US7443486B2Oct 28, 2008

Method for predicting a critical dimension of a feature imaged by a lithographic apparatus

ASML NETHERLANDS BV13 citations81

US9964853B2May 8, 2018

Method of determining dose and focus, inspection apparatus, patterning device, substrate and device manufacturing method

ASML NETHERLANDS BV6 citations68

MEGENS HENRICUS JOHANNES LAMBERTUS

2 patents

US8982328B2Mar 17, 2015

Method and apparatus for overlay measurement

MEGENS HENRICUS JOHANNES LAMBERTUS0 citations45

US8502955B2Aug 6, 2013

Method of determining a characteristic

MEGENS HENRICUS JOHANNES LAMBERTUS1 citations45

BHATTACHARYYA KAUSTUVE

1 patent

US9223227B2Dec 29, 2015

Inspection apparatus and method, lithographic apparatus, lithographic processing cell and device manufacturing method

BHATTACHARYYA KAUSTUVE16 citations80

LEEWIS CHRISTIAN MARINUS

1 patent

US8848195B2Sep 30, 2014

Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method for determining a property of a substrate

LEEWIS CHRISTIAN MARINUS0 citations48