Inventor
KODASHIMA AKIRA
JP4 patents
⚠️ This page may combine multiple inventors who share the name “KODASHIMA AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
3 patentsUS7883579B2Feb 8, 2011
Substrate processing apparatus and lid supporting apparatus for the substrate processing apparatus
TOKYO ELECTRON LTD8 citations77
US11515183B2Nov 29, 2022
Substrate processing system
TOKYO ELECTRON LTD0 citations56
US11495480B2Nov 8, 2022
Substrate processing system
TOKYO ELECTRON LTD0 citations45