Inventor
SOAVE ROBERT J
US5 patents
⚠️ This page may combine multiple inventors who share the name “SOAVE ROBERT J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
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2 patentsTOKYO ELECTRON LTD
2 patentsUS7183183B2Feb 27, 2007
Method for using ion implantation to treat the sidewalls of a feature in a low-k dielectric film
TOKYO ELECTRON LTD12 citations79
US7959970B2Jun 14, 2011
System and method of removing chamber residues from a plasma processing system in a dry cleaning process
TOKYO ELECTRON LTD12 citations78