Inventor

HAYASHIDA KOICHIRO

JP3 patents

⚠️ This page may combine multiple inventors who share the name “HAYASHIDA KOICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SUMCO TECHXIV CORP

2 patents

US8021484B2Sep 20, 2011

Method of manufacturing epitaxial silicon wafer and apparatus therefor

SUMCO TECHXIV CORP9 citations80

US7993452B2Aug 9, 2011

Method of manufacturing epitaxial silicon wafer

SUMCO TECHXIV CORP3 citations59

NARAHARA KAZUHIRO

1 patent

US8888913B2Nov 18, 2014

Method of manufacturing epitaxial silicon wafer and apparatus therefor

NARAHARA KAZUHIRO0 citations43