Inventor
HORITA AKIHIRO
JP5 patents
⚠️ This page may combine multiple inventors who share the name “HORITA AKIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TDK CORP
3 patentsUS6296894B1Oct 2, 2001
Evaporation source, apparatus and method for the preparation of organic El device
TDK CORP76 citations92
US7794563B2Sep 14, 2010
Etching depth measuring device, etching apparatus, and etching depth measuring method
TDK CORP2 citations61
US7321198B2Jan 22, 2008
Ion source with uniformity of radial distribution of ion beam intensity
TDK CORP5 citations61