Inventor

STEVENSON THOMAS R

US4 patents

⚠️ This page may combine multiple inventors who share the name “STEVENSON THOMAS R”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

1 patent

US7862682B2Jan 4, 2011

Showerhead electrode assemblies for plasma processing apparatuses

LAM RES CORP32 citations86

US ADM NAT AERONOTICS AND SPACE ADMINISTRATION

1 patent

US9383254B1Jul 5, 2016

Symmetric absorber-coupled far-infrared microwave kinetic inductance detector

US ADM NAT AERONOTICS AND SPACE ADMINISTRATION10 citations76

STEVENSON THOMAS R

1 patent

US8313665B2Nov 20, 2012

Showerhead electrode assemblies for plasma processing apparatuses

STEVENSON THOMAS R0 citations43

NASA

1 patent

US10074764B2Sep 11, 2018

Method of fabricating x-ray absorbers for low-energy x-ray spectroscopy

NASA0 citations42