Inventor
CHEW SOON AIK
BE5 patents
Patents
5 patentsUS9287273B2Mar 15, 2016
Method for manufacturing a semiconductor device comprising transistors each having a different effective work function
IMEC VZW418 citations96
US9105746B2Aug 11, 2015
Method for manufacturing a field effect transistor of a non-planar type
IMEC VZW4 citations71
US10593765B2Mar 17, 2020
Method for forming source/drain contacts
IMEC VZW1 citations58
US10153341B2Dec 11, 2018
Method of forming internal spacer for nanowires
IMEC VZW1 citations50
US11430876B2Aug 30, 2022
Method for producing self-aligned gate and source/drain via connections for contacting a FET transistor
IMEC VZW0 citations47