Inventor
TSUDA MUTSUMI
JP12 patents
⚠️ This page may combine multiple inventors who share the name “TSUDA MUTSUMI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
10 patentsUS5760366AJun 2, 1998
Thin film forming apparatus using laser and magnetic field
MITSUBISHI ELECTRIC CORP87 citations96
US5115167AMay 19, 1992
Plasma processor
MITSUBISHI ELECTRIC CORP55 citations95
US6110291AAug 29, 2000
Thin film forming apparatus using laser
MITSUBISHI ELECTRIC CORP67 citations94
US5146138ASep 8, 1992
Plasma processor
MITSUBISHI ELECTRIC CORP7 citations73
US10833628B2Nov 10, 2020
Failure diagnostic method and failure diagnostic device of solar cell string
MITSUBISHI ELECTRIC CORP1 citations62
US8053254B2Nov 8, 2011
Apparatus for forming thin film and method of manufacturing semiconductor film
MITSUBISHI ELECTRIC CORP4 citations62
US6756312B2Jun 29, 2004
Method of fabricating a semiconductor device including time-selective etching process
MITSUBISHI ELECTRIC CORP1 citations51
US10559659B2Feb 11, 2020
Power semiconductor device
MITSUBISHI ELECTRIC CORP0 citations49
US10622532B2Apr 14, 2020
Thermoelectric conversion module and method of manufacturing the same
MITSUBISHI ELECTRIC CORP0 citations41
US10187009B2Jan 22, 2019
Method for diagnosing solar cell module, and diagnostic circuit and diagnostic system for solar cell module
MITSUBISHI ELECTRIC CORP0 citations39