Inventor
MARKS ZEFRAM
US6 patents
⚠️ This page may combine multiple inventors who share the name “MARKS ZEFRAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
4 patentsUS11268911B2Mar 8, 2022
Boron-based capping layers for EUV optics
KLA TENCOR CORP2 citations68
US10741354B1Aug 11, 2020
Photocathode emitter system that generates multiple electron beams
KLA TENCOR CORP1 citations57
US10714294B2Jul 14, 2020
Metal protective layer for electron emitters with a diffusion barrier
KLA TENCOR CORP0 citations48
US10840055B2Nov 17, 2020
System and method for photocathode illumination inspection
KLA TENCOR CORP0 citations46