Inventor
VAIDYA KAUSHIK
IN6 patents
⚠️ This page may combine multiple inventors who share the name “VAIDYA KAUSHIK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
5 patentsUS6916399B1Jul 12, 2005
Temperature controlled window with a fluid supply system
APPLIED MATERIALS INC168 citations96
US6432259B1Aug 13, 2002
Plasma reactor cooled ceiling with an array of thermally isolated plasma heated mini-gas distribution plates
APPLIED MATERIALS INC104 citations96
US6364957B1Apr 2, 2002
Support assembly with thermal expansion compensation
APPLIED MATERIALS INC368 citations95
US10253406B2Apr 9, 2019
Method for forming yttrium oxide on semiconductor processing equipment
APPLIED MATERIALS INC0 citations49
US10872749B2Dec 22, 2020
Textured skin for chamber components
APPLIED MATERIALS INC0 citations47