Inventor
MISAKA SHINICHIRO
JP3 patents
Patents
3 patentsUS10049905B2Aug 14, 2018
Substrate heat treatment apparatus, substrate heat treatment method, storage medium and heat-treatment-condition detecting apparatus
TOKYO ELECTRON LTD2 citations66
US11201068B2Dec 14, 2021
Heat treatment apparatus, method of managing heat treatment apparatus and storage medium
TOKYO ELECTRON LTD0 citations44
US11142823B2Oct 12, 2021
Substrate processing apparatus, substrate processing method, and storage medium
TOKYO ELECTRON LTD0 citations41