Inventor
HENKE WOLFGANG HELMUT
DE7 patents
Patents
7 patentsUS10281825B2May 7, 2019
Method of sequencing lots for a lithographic apparatus
ASML NETHERLANDS BV16 citations82
US11249404B2Feb 15, 2022
System and method for measurement of alignment
ASML NETHERLANDS BV2 citations68
US12493248B2Dec 9, 2025
Method for optimizing a sampling scheme and associated apparatuses
ASML NETHERLANDS BV0 citations60
US10915689B2Feb 9, 2021
Method and apparatus to correct for patterning process error
ASML NETHERLANDS BV0 citations49
US11150565B2Oct 19, 2021
Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations48
US10845719B2Nov 24, 2020
Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations47
US11709434B2Jul 25, 2023
Device manufacturing method
ASML NETHERLANDS BV0 citations46