Inventor
CUVALCI EMRE
US5 patents
Patents
5 patentsUS11268193B2Mar 8, 2022
Gas injection apparatus with heating channels
APPLIED MATERIALS INC0 citations59
US10689757B2Jun 23, 2020
Gas injection apparatus with heating channels
APPLIED MATERIALS INC0 citations49
US11004704B2May 11, 2021
Finned rotor cover
APPLIED MATERIALS INC0 citations48
US9279604B2Mar 8, 2016
Compact ampoule thermal management system
APPLIED MATERIALS INC0 citations48
US9869017B2Jan 16, 2018
H2/O2 side inject to improve process uniformity for low temperature oxidation process
APPLIED MATERIALS INC0 citations39