Inventor
SUN JIN SUNG
KR4 patents
Patents
4 patentsUS11935779B2Mar 19, 2024
Transfer hand and substrate processing apparatus with conductive ring and tilting vacuum pad
SEMES CO LTD1 citations58
US11986967B2May 21, 2024
Apparatus for treating substrate and method for detecting state of substrate
SEMES CO LTD0 citations56
US12334386B2Jun 17, 2025
Apparatus and method for treating substrate
SEMES CO LTD0 citations47
US11651979B2May 16, 2023
Transfer unit and apparatus for treating substrate
SEMES CO LTD0 citations47