Inventor
KRÜCKEN WILHELM JOSEF THOMAS
DE4 patents
Patents
4 patentsUS11746419B2Sep 5, 2023
Shield plate for a CVD reactor
AIXTRON SE2 citations63
US12084768B2Sep 10, 2024
Method for using shield plate in a CVD reactor
AIXTRON SE0 citations53
US12305282B2May 20, 2025
Susceptor of a CVD reactor
AIXTRON SE0 citations44
US10883171B2Jan 5, 2021
CVD reactor and method for cleaning a CVD reactor
AIXTRON SE0 citations44