Inventor
YOSHINARI HIDEKI
JP15 patents
Patents
15 patentsUS4749867AJun 7, 1988
Exposure apparatus
CANON KK46 citations92
US4748477AMay 31, 1988
Exposure apparatus
CANON KK40 citations92
US4676630AJun 30, 1987
Exposure apparatus
CANON KK45 citations92
US4262208AApr 14, 1981
Photo-electrical detecting apparatus
CANON KK30 citations92
US4998134AMar 5, 1991
Exposure apparatus
CANON KK21 citations82
US4864360ASep 5, 1989
Exposure apparatus
CANON KK21 citations82
US4315201AFeb 9, 1982
Alignment apparatus for mask and wafer used in manufacturing semiconductor circuit elements
CANON KK24 citations82
US4301363ANov 17, 1981
Alignment device
CANON KK23 citations82
US3950094AApr 13, 1976
Both-side printing device
CANON KK19 citations82
US4202627AMay 13, 1980
Photoelectric detecting apparatus
CANON KK19 citations81
US4278893AJul 14, 1981
Alignment apparatus
CANON KK8 citations73
US4275306AJun 23, 1981
Alignment apparatus
CANON KK15 citations73
US4179110ADec 18, 1979
Method for opposing a sheet-like material to a standard plane with predetermined space therebetween
CANON KK13 citations73
US3984186AOct 5, 1976
Projection masking system
CANON KK14 citations73
US4215934AAug 5, 1980
Printing apparatus
CANON KK18 citations72