Inventor

MULTANI JAGIR

US3 patents

Patents

3 patents

US4980018ADec 25, 1990

Plasma etching process for refractory metal vias

INTEL CORP240 citations96

US5035768AJul 30, 1991

Novel etch back process for tungsten contact/via filling

INTEL CORP44 citations90

US5167760ADec 1, 1992

Etchback process for tungsten contact/via filling

INTEL CORP13 citations71