Inventor

CURRIE JAMES E

US5 patents

⚠️ This page may combine multiple inventors who share the name “CURRIE JAMES E”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ADVANCED TECH MATERIALS

2 patents

US5993685ANov 30, 1999

Planarization composition for removing metal films

ADVANCED TECH MATERIALS60 citations95

US6322600B1Nov 27, 2001

Planarization compositions and methods for removing interlayer dielectric films

ADVANCED TECH MATERIALS115 citations94

IBM

2 patents

US5267418ADec 7, 1993

Confined water fixture for holding wafers undergoing chemical-mechanical polishing

IBM36 citations91

US5262346ANov 16, 1993

Nitride polish stop for forming SOI wafers

IBM38 citations90

ADVANCED TECHNOLOGY & MATERIAL

1 patent

US6267909B1Jul 31, 2001

Planarization composition for removing metal films

ADVANCED TECHNOLOGY & MATERIAL18 citations88