Inventor
MOSLEY RODERICK CRAIG
US2 patents
Patents
2 patentsUS6537905B1Mar 25, 2003
Fully planarized dual damascene metallization using copper line interconnect and selective CVD aluminum plug
APPLIED MATERIALS INC37 citations91
US7112528B2Sep 26, 2006
Fully planarized dual damascene metallization using copper line interconnect and selective CVD aluminum plug
APPLIED MATERIALS INC14 citations82