Inventor
CHAMBERLAIN JEFFREY P
US9 patents
⚠️ This page may combine multiple inventors who share the name “CHAMBERLAIN JEFFREY P”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CABOT MICROELECTRONICS CORP
8 patentsUS6936543B2Aug 30, 2005
CMP method utilizing amphiphilic nonionic surfactants
CABOT MICROELECTRONICS CORP82 citations96
US6776810B1Aug 17, 2004
Anionic abrasive particles treated with positively charged polyelectrolytes for CMP
CABOT MICROELECTRONICS CORP112 citations96
US6821897B2Nov 23, 2004
Method for copper CMP using polymeric complexing agents
CABOT MICROELECTRONICS CORP60 citations95
US6431953B1Aug 13, 2002
CMP process involving frequency analysis-based monitoring
CABOT MICROELECTRONICS CORP57 citations95
US7306637B2Dec 11, 2007
Anionic abrasive particles treated with positively charged polyelectrolytes for CMP
CABOT MICROELECTRONICS CORP27 citations91
US6974777B2Dec 13, 2005
CMP compositions for low-k dielectric materials
CABOT MICROELECTRONICS CORP35 citations90
US6726534B1Apr 27, 2004
Preequilibrium polishing method and system
CABOT MICROELECTRONICS CORP39 citations89
US6612911B2Sep 2, 2003
Alkali metal-containing polishing system and method
CABOT MICROELECTRONICS CORP11 citations71