Inventor
GERBER KEVIN
US4 patents
⚠️ This page may combine multiple inventors who share the name “GERBER KEVIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
3 patentsUS9399228B2Jul 26, 2016
Method and apparatus for purging and plasma suppression in a process chamber
NOVELLUS SYSTEMS INC428 citations98
US7704894B1Apr 27, 2010
Method of eliminating small bin defects in high throughput TEOS films
NOVELLUS SYSTEMS INC50 citations96
US8034725B1Oct 11, 2011
Method of eliminating small bin defects in high throughput TEOS films
NOVELLUS SYSTEMS INC5 citations61