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Inventor
SUGIMAN TAKAHISA
JP
3 patents
⚠️ This page may combine multiple inventors who share the name “SUGIMAN TAKAHISA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SUMCO TECHXIV CORP
2 patents
US7759227B2
Jul 20, 2010
Silicon semiconductor substrate heat-treatment method and silicon semiconductor substrate treated by the method
SUMCO TECHXIV CORP
13 citations
80
US7875117B2
Jan 25, 2011
Nitrogen doped silicon wafer and manufacturing method thereof
SUMCO TECHXIV CORP
4 citations
56
KOZASA KAZUAKI
1 patent
US8992791B2
Mar 31, 2015
Method of cleaning semiconductor wafer and semiconductor wafer
KOZASA KAZUAKI
0 citations
36