Inventor

VAN DEN HEUVEL MARTINUS WILHELMUS

NL4 patents

⚠️ This page may combine multiple inventors who share the name “VAN DEN HEUVEL MARTINUS WILHELMUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

2 patents

US9213246B2Dec 15, 2015

Fluid extraction system, lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV2 citations60

US7843548B2Nov 30, 2010

Conduit system for a lithographic apparatus, lithographic apparatus, pump, and method for substantially reducing vibrations in a conduit system

ASML NETHERLANDS BV0 citations43

KEMPER NICOLAAS RUDOLF

1 patent

US8654309B2Feb 18, 2014

Fluid extraction system, lithographic apparatus and device manufacturing method

KEMPER NICOLAAS RUDOLF3 citations60

VAN DEN HEUVEL MARTINUS WILHELMUS

1 patent

US8976332B2Mar 10, 2015

Conduit system for a lithographic apparatus, lithographic apparatus, pump, and method for substantially reducing vibrations in a conduit system

VAN DEN HEUVEL MARTINUS WILHELMUS0 citations40