Inventor

TURMEL ODETTE

US4 patents

⚠️ This page may combine multiple inventors who share the name “TURMEL ODETTE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

3 patents

US7981699B2Jul 19, 2011

Method for tunably repairing low-k dielectric damage

LAM RES CORP6 citations60

US7534363B2May 19, 2009

Method for providing uniform removal of organic material

LAM RES CORP3 citations60

US7521362B2Apr 21, 2009

Methods for the optimization of ion energy control in a plasma processing system

LAM RES CORP1 citations51

TAKESHITA KENJI

1 patent

US8222155B2Jul 17, 2012

Selectivity control in a plasma processing system

TAKESHITA KENJI2 citations59