Inventor
GOMI SAORI
JP3 patents
Patents
3 patentsUS9779913B2Oct 3, 2017
Charged particle beam drawing apparatus and drawing data generation method
NUFLARE TECHNOLOGY INC2 citations71
US9734981B2Aug 15, 2017
Charged particle beam writing apparatus and charged particle beam writing method
NUFLARE TECHNOLOGY INC0 citations36
US9117632B2Aug 25, 2015
Charged particle beam writing apparatus and charged particle beam writing method
NUFLARE TECHNOLOGY INC0 citations36