Inventor
SHUALL NIMROD
US4 patents
Patents
4 patentsUS9329033B2May 3, 2016
Method for estimating and correcting misregistration target inaccuracy
KLA TENCOR CORP8 citations82
US10817999B2Oct 27, 2020
Image-based overlay metrology and monitoring using through-focus imaging
KLA TENCOR CORP2 citations62
US10565697B2Feb 18, 2020
Utilizing overlay misregistration error estimations in imaging overlay metrology
KLA TENCOR CORP0 citations37
US10379449B2Aug 13, 2019
Identifying process variations during product manufacture
KLA TENCOR CORP0 citations36