Inventor
LU JOU-HSUAN
TW3 patents
Patents
3 patentsUS11809083B2Nov 7, 2023
EUV photolithography system fuel source and methods of operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations71
US12235586B2Feb 25, 2025
EUV photolithography system fuel source and methods of operating the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12063734B2Aug 13, 2024
Droplet generator assembly and method of replacing components
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50