Inventor
YASAR TUGRUL
US18 patents
⚠️ This page may combine multiple inventors who share the name “YASAR TUGRUL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS6548112B1Apr 15, 2003
Apparatus and method for delivery of precursor vapor from low vapor pressure liquid sources to a CVD chamber
TOKYO ELECTRON LTD76 citations97
US6417626B1Jul 9, 2002
Immersed inductively—coupled plasma source
TOKYO ELECTRON LTD64 citations95
US6755945B2Jun 29, 2004
Ionized PVD with sequential deposition and etching
TOKYO ELECTRON LTD108 citations94
US6635569B1Oct 21, 2003
Method of passivating and stabilizing a Ti-PECVD process chamber and combined Ti-PECVD/TiN-CVD processing method and apparatus
TOKYO ELECTRON LTD24 citations92
US6652711B2Nov 25, 2003
Inductively-coupled plasma processing system
TOKYO ELECTRON LTD31 citations91
US6183615B1Feb 6, 2001
Transport system for wafer processing line
TOKYO ELECTRON LTD59 citations91
US6302057B1Oct 16, 2001
Apparatus and method for electrically isolating an electrode in a PECVD process chamber
TOKYO ELECTRON LTD34 citations89
US5958134ASep 28, 1999
Process equipment with simultaneous or sequential deposition and etching capabilities
TOKYO ELECTRON LTD28 citations89
US6632737B1Oct 14, 2003
Method for enhancing the adhesion of a barrier layer to a dielectric
TOKYO ELECTRON LTD5 citations62
US6730605B2May 4, 2004
Redistribution of copper deposited films
TOKYO ELECTRON LTD5 citations61
US7744735B2Jun 29, 2010
Ionized PVD with sequential deposition and etching
TOKYO ELECTRON LTD6 citations60
NAT MICRONETICS INC
3 patentsUS5105529AApr 21, 1992
Process for airborne monolithic ferrite recording head with glass-protected self-aligned, machined track
NAT MICRONETICS INC20 citations76
US5072322ADec 10, 1991
Monolithic ferrite recording head with glass-protected, self-aligned, machined track
NAT MICRONETICS INC10 citations67
US4112196ASep 5, 1978
Beam lead arrangement for microelectronic devices
NAT MICRONETICS INC13 citations63