Inventor

ZHU XIEQING

GB3 patents

⚠️ This page may combine multiple inventors who share the name “ZHU XIEQING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AGERE SYSTEMS INC

2 patents

US6440620B1Aug 27, 2002

Electron beam lithography focusing through spherical aberration introduction

AGERE SYSTEMS INC11 citations70

US6620565B2Sep 16, 2003

Electron beam lithography apparatus focused through spherical aberration introduction

AGERE SYSTEMS INC0 citations48

AGERE SYST GUARDIAN CORP

1 patent

US6420714B1Jul 16, 2002

Electron beam imaging apparatus

AGERE SYST GUARDIAN CORP5 citations59